Electronic module, process control
AKT
1x CPU board MOTOROLAMVME3100
1x CVD COMM. INTERFACE 0100-71278
1x Analog I /O Board 0100-00396
5x digital I /O board 0100-76124
1x P-CH Interlock Card 0100-71261
1x Chamber Control CVD 25K 0100-71121
1x Interlock Status Panel 0110-71232
1x P2 backplane 60K CVD 0100-71275
1x chassis 0242-72575
used, checked!
Dimensions: 485 x 305 x 400mm
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